TEL Mark VA Track System


Available as: Certified/Pre-owned or Refurbished



 - 3"-150mm Substrates
 - Up to 90 WPM
 - Single Wafer/Lot Control
 - Stacked Hot Plates
 - Vacuumless Twin Arm Transfer
 - User Friendly, Menu Driven Operator Interface

TEL’s CLEAN TRACK MARK VA features a two tier hot plate system that reduces overall system footprint compared with competitive systems of its class. It is ideal for all substrates, including GaAs and other fragile materials.

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