TEL Mark Vz & MARK VA Track Systems

Available as: Certified/Pre-owned or Refurbished



  • 3"-150mm Substrates
  • MK Vz: Up to 120 wph / MK VA Up to 90 wph
  • Single Wafer/Lot Control
  • Two Tier Stacked Thermal Modules
  • Vacuumless Twin Arm Transfer
  • User Friendly, Menu Driven Operator Interface
  • Random-Path Wafer Flows

MARK Vz/VA systems features a two tier hot plate system that reduces overall system footprint compared with competitive systems of its class. It is ideal for all substrates, including GaAs and other fragile materials.

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