SVG Tracks


     

SVG 9O-S/SE

  • Random Path Processing
  • 100mm - 200mm Round Substrates
  • Silicon or Exotic Materials
  • Processing to 0.18µm
  • I-Line or DUV
  • Licensed Software
  • SVG 90-S/SE Coater
  • SVG 90-S/SE Developer
  • Rite Track is Product Line Owner

Rite Track 88e

  • Serial Robotic Arm Transfer
  • 100mm - 200mm Round Substrates
  • Silicon or Exotic Materials
  • Processing to 0.5µm
  • I-Line
  • Licensed Software
  • Rite Track is Product Line Owner

SVG 88

  • Serial Robotic Arm Transfer
  • 3" - 6" Round Substrates
  • Silicon or Exotic Materials
  • Processing to 0.7µm
  • I-Line
  • Licensed Software
  • SVG 88 Coater
  • SVG 88 Developer
  • Rite Track is Product Line Owner

SVG 86

  • Serial Belt Transfer
  • 2" - 6" Round Substrates; Squares
  • Silicon or Exotic Materials
  • Processing to 1.0 µm
  • I-Line
  • Licensed Software
  • SVG 86 Coater
  • SVG 86 Developer
  • SVG 86 Scrubber
  • Rite Track is Product Line Owner

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