86 Systems

Available as: New and Remanufactured

All 86 series systems are capable of processing 2" through 150mm substrates. Wafer size change is simple and requires minutes, not hours. Silicon, GaAs, sapphire, GGG, Lithium Niobate, thin film heads, MEMS and many other substrate types are routinely processed on 86 Series systems. The 86 Series are even able to process square substrates up to 125mm on a side (180mm diagonal).

The 86 series uses a simple and very forgiving belt transfer system to reduce wafer breakage. This belted system has low transfer overhead times, resulting in high throughput on an in-line track system.


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