Dual Wafer Size for Mark Series

Reduce or eliminate your downtime associated with Track wafer size changeovers.  This Rite Track-engineered upgrade allows you to run different wafer sizes simultaneously, thus eliminating costly and time-consuming changeovers

  • Allow simultaneous operation of two wafer sizes
  • Available as a field retrofit to existing Mark Vz & 7/8 systems
  • Available with any Rite Track refurbished Mark system
  • Increase tool uptime by eliminating time changing wafer sizes on your system
  • Eliminate the need for redundant, size-dedicated production tools
  • Perfect solution for fabs running multiple wafer sizes - R&D, foundry, pilot production, other needs
  • Ideal for processing standard wafer sizes and Silicon-on-Glass or other unique wafer carrier needs

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