Rite Track is the owner of the SVG 9X series
Intellectual Property, including software. As a result,
Rite Track is the only choice for certified OEM
compatible upgrades and enhancements. Below is a list of
just some of the enhancements Rite Track can provide:
|
 |
Developer/DI Dispense (Eclipse)
- Reduction in developer and DI dispense
by up to 50%.
- Reduce defect counts through improved
rinsing mechanism.
- Improved rinsing on edge of 8’’ wafers,
compared to dual stream.
- Uniform develop rates cross wafer.
Reduced process time up to 23%
150, 200 mm substrate
|
Wafer-handling Passive Centering
- Available for all chill plates and all
stages.
- Designed for 150mm and 200mm wafers.
- CP capture range of 9mm
Stage capture range of 6mm
|
 |
|
 |
90-SE Coater Spindle
- Weight of spindle assembly reduced by
20%.
- Float introduced for lead nut to prevent
binding.
- Rotation of lead nut prevented to
improve repeatability.
- Super smart ball bushings able to self
align.
- Quick disconnect for chuck vacuum.
90-SE only
|
Dispense Arm – Improved Packaging
- x and z guide-rails replaced by
precision linear guide rails.
- Internal wiring on motors.
|
 |
|
 |
Coater Dispense Nozzle Tips
- Individually replaceable tips
- Molded parts as opposed to machined
units.
- Easy and inexpensive to replace.
|
Resist Dispense Tip Assy. Replacement
- Upgrade older 99-45456-02 coater
dispense arms to accept the molded nozzle
tips.
|
 |
|
 |
Main Shuttle Improvement
- Add limit switches to determine number
of steps between Switch 1 and Switch 2
- Second switch allows for calibration
check during operation.
|
8655 Rite Track Way