Spin End Station Addition

• Increase throughout of existing tools with minimal footprint addition
• Coater or Developer at end of system
• 125 to 200mm size options
• Mark Vz version also available

   

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Thermal End Station Addition

• HP/HP or HP/COL option at end of system – opposite C/S
• Internal packaging for COL P.S. units
• 3” to 150mm size options

   

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Reduced Resist Consumption

• Solvent Pre-Wet Addition to Coater
• Programmed stream solvent dispense at wafer center
• Available with any resist pump (no RRC pump/controller required)
• Mark V, Vz, 7/8 versions

   

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Auto Size Change

• Auto Size Change between two sizes
• Lot to lot or wafer to wafer operation with no change required (max 9mm diameter differential)
• Current kits:
• 100 to 109
• Others upon request

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Circulator Repair

• Superior circulator repair capability for SMC Thermo-con and Komatsu Electronics Circulators
• Repaired with new OEM or equivalent parts
• Repaired to original OEM specifications
• Fully tested under load to original specifications

   

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WEE Unit Refurbishment

Coming Soon...

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Chemical Cabinets

• Configurable Chemical Cabinet – new or re-manufactured
• PLC-driven with a touch-screen color display
• Resist bottle/NP switching and bulk HMDS/Solvent/Developer options

   

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Spin Unit Changes & Additions

• Add spin units to existing tracks for throughput improvement
• Add/ Change Thermal units to improve performance
• Add or modify Pumps to your needs for today's resists

   

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Syringe Dispense

• 55cc N2 pressurized syringe dispense
• Pressure/time control
• Controlled as one of 4 maximum coater dispenses

   

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Double Side Processing

Reverser, Edge Handling Chuck, & Edge Handling HP

   

• Add a reverser unit to an open thermal stack area to flip wafer for backside processing

   

Backside contact in outer 3-4 mm only New HP heating element and pin lift assembly 150mm and 200mm capable

Edge-grip, pneumatically controlled chuck Wafer flat/notch orientation 150mm and 200mm capable