Rite Track Logo Whilte

Who We Are?

Our Mission

To provide high quality products and support services to extend equipment life

Established in 1993, Rite Track is a leader in consolidated sales & support solutions for the semiconductor industry’s most popular mature production coat & develop equipment and wafer carrier inspection systems.

As product lines mature, OEMs must focus resources on their newest lines which leave product sustainability voids for those still utilizing capable second generation equipment. Rite Track provides a bridge for fabs to continue capitalizing on their current equipment investments; offering extensive upgrades, parts sales, and technical services worldwide to dramatically extend equipment life & usefulness. 

Whether you are looking for new or refurbished/remanufactured systems, product enhancements, or technical product / parts support, Rite Track has a solution across a variety of platforms & manufacturers. Through Rite Track’s global logistics network, technical & spare parts support, relocation services, upgrade/enhancement kits, and custom engineering services are available for all Rite Track supported products.

Member since 1996

Secondary Equipment & Applications Charter Member

The Rite Track Advantage

Rite Track offers the broadest range of coat & develop equipment in the industry to process substrates from 1.5″ square to 300 mm round, from the very fragile to the robust. Rite Track offers customers a choice of either serial or random-path track platforms in application specific, custom configurations to best suit their unique process and budget requirements. Product lines are not limited to one OEM’s products. We focus on the industry’s best production equipment to match your needs. Exclusive innovations on our supported product lines provide capabilities far beyond the original design function.

With a vast parts inventory, Rite Track offers support for TEL ACT & Mark, DNS 60/80 systems as an industry-recognized track system expert and for SVG 8X/9X systems as the exclusive product line owner. Our dedicated engineering team & product experts address equipment life with engineered solutions to keep your systems in production, even as industry requirements change.

Along with growth comes added responsibility to the customer. Rite Track has established logistics centers in Asia and Europe, with additional sales and service offices worldwide. The need for customer equipment maintenance training has likewise grown. Training is done in our state-of-the-art training facility in West Chester, Ohio on all Rite Track supplied products.

Exclusive SVG 86, 88, 90-S,SE Product Line Owner

To further support the SVG track products that have been our foundation from the start, Rite Track purchased the SVG 86, 88, 88e and 9X track system product lines from ASML in 2003 and remains the sole owner of these product lines today. Rite Track continues to provide new, remanufactured, refurbished SVG track systems worldwide under the Rite Track name. 

EAGLEi & CV9800/9812 Product Line Owner

Introduced in 2018, RIte Track’s NEW EAGLEi Series has been a popular addition for fabs looking to minimize yield loss. Fabs use the EAGLEi series to quickly identify out-of-tolerance wafer carriers in-process inspection. Removing carriers that do not meet specification will improve wafer transfers, maximize equipment availability, and enhance overall yield through a reduction in wafer breakage and particle contamination.

Rite Track purchased the August 9800 & 9812 wafer carrier inspection product line in 2015. This product line was discontinued in July 2018; replaced by our new EAGLEi line.

Quality & Product KNowledge

Rite Track is known for quality products, excellent service, and support after the sale. Our product knowledge ensures that the systems manufactured or refurbished by Rite Track meet or exceed all OEM published specifications.


We believe that we owe our customers the highest quality, most reliable products and services we can provide, using experienced individuals who take pride in their work. Our factory technicians and field service engineers have over 400 years of combined direct track experience.

Quality Policy / Mission Statement

To provide the highest level of innovative products and services designed to meet the ever changing needs of our customers through a commitment to continual improvement.