SVG Upgrades & Enhancements

86, 88 & 90-S/SE Systems

SVG Retrofits & UpgradeS to Extend Equipment Life

Rite Track purchased the SVG 86, 88, and 90-SE product lines in 2003. We still actively develop new retrofit kits to increase system longevity and usefulness. From our popular dual & multi size upgrade to run with no change over time to solvent pre-wet upgrades to save on materials, we have or can create a solution to fit just about any need. 

SVG 86 & SVG 88 Upgrades

Ultrasonic Indexer Sensor

One Sensor for All Wafer Types!
  • Not affected by the blue oxide backed wafers like current glass sensors
  • One-time easy setup.
  • Not adjustment between types of wafers needed.
  • From Silicon to SiC; this sensor can see them all!

NetTRACK System Manager & CPU

  • Recipe Download Management
  • Lot Recipe Download Capability
  • Real-time Data Viewing
  • Component Exercise Mode
  • Alarm & Operational Logs
  • Barcode Option to Automate Recipe Selection
  • Programmable Pre-Dispense
  • Programmable EBR Offset 
  • Alarm & Operational Logs
  • SECS/GEM Host Communication Option

NetTRACK System Manager adds a graphical interface on SVG 8X track systems for ease of use. It’s design allows for seamless control of the track, directly from the included touchscreen & PC. NetTRACK System Manager expands recipe storage capability with the included NetTrack CPU to provide 99 recipe data storage. Eliminate operator programming errors with lot based recipe downloads to multiple module card cage controllers at once. Combine with Host Communication for full integration. For those on a tight budget, the NetTRACK CPU board can also be purchased separately to expand recipe storage.

Auto Size-Change - Reduce or eliminate your downtime!

Downtime associated with Track wafer size changeovers can be costly. Upgrade your track with Rite Track’s Auto-Size Change retrofit and run two sizes on the same track with no changeover.

 
Features
  • Run two different wafer sizes with NO changeover
  • Wafer size changes automatically on cassette load
  • Available as a field retrofit to existing SVG/Rite Track OEM-compliant 88 & 88e Systems
  • Available with any Rite Track remanufactured 88 or 88e System
 
Benefits
  • Run two different wafer sizes with NO changeover
  • Wafer size changes automatically on cassette load
  • Available as a field retrofit to existing SVG/Rite Track OEM-compliant 88 & 88e Systems
  • Available with any Rite Track remanufactured 88 or 88e System
 

HI Performance Spindle for Coat and Develop

Develop Module
  • Develop Hi Performance Spindle Upgrade
  • Single servo motor: +2 RPM control
  • >5 RPM low speed
  • Eliminates DC motors, clutch!
  • Reduced maintenance cost
  • 99 recipe storage
  • Exercise mode capability
Coat Module
  • Develop Hi Performance Spindle Upgrade
  • Single servo motor: +2 RPM control
  • >5 RPM low speed
  • Eliminates DC motors, clutch!
  • Reduced maintenance cost
  • 99 recipe storage
  • Exercise mode capability

Module Reconfigurations

  • Module Additions
  • System Reconfigurations
  • Module Trade-in Credits
  • Track Additions
  • Ultrasonic Indexer Sensor (NEW)
  • 4th Dispense Line
  • Solvent Vapor Tip 
  • Vapor Prime
  • 3-pin Hotplate Upgrades
  • Fixed Proximity Hot Plates
  • Hot Plate Controller Upgrades
  • High Torque Indexers

Module Upgrades

Fluid Control Upgrades

  • Bottle Low Level Sensors
  • Drain High Level Sensors
  • Pump Modifications
  • Submicron Upgrade Kits

System Upgrades

  • Temperature Control Units
  • Pullout Drawers (pump, drain)
  • Pressure Canisters
  • Fluid Level Sensorization
  • Digital Vacuum Switches

90-/SE Upgrades

Rite Track is the owner of the SVG 9X series Intellectual Property, including software. As a result, Rite Track is the only choice for certified OEM compatible upgrades and enhancements. Below is a list of just some of the enhancements Rite Track can provide:

Save Develop with Eclipse Upgrade

Eliminate Wafer Size-Change Downtime

  • Up to 50% Reduction in developer & DI
  • Reduce defect counts –  improved rinsing mechanism
  • Improved edge rinsing on 8’’ wafers compared to dual stream.
  • Uniform develop rates cross wafer.
  • Reduced process time up to 23%
  • 150, 200 mm substrate
Improve Uniformity!
Dual / Multi Wafer Size Option
  • Run 2, 3, or 4 different wafers sizes with no changeover
  • Dramatically increase up-time
  • Streamline production
  • Maximize Equipment Engineering Load
  • Minimize Changeover Issues 
90-SDualSize-Full

Controller Upgrades

  • Replacement USB for floppy drive
  • Replacement Flash Drive Upgrade
  • Replacement flat panel LCD display monitor
  • Replacement keyboard

Software Upgrades

  • 18B Revision
  • Flowmeter monitoring for VP, Solvent, Develop or DI Water dispenses

Flow Meter Monitoring to Avoid Misprocessing

Monitor & Alarm using Flow Meter Sensorization
  • Eliminate misprocessing of wafers due to improper chemical dispense
  • Available for HMDS, Solvent, Developer, DI Water
  • Break-beam sensors
  • Interlock applicable Coater, Developer or ADH module through MOC (multi-option controller). 
  • Also available with FM Sensor SW panel
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